정보
- ISBN : 052102997X
- 출판사 : Cambridge University Press
- 출판일 : 20070305
- 저자 : Attwood, David T.
요약
● ● THIS DETAILED, COMPREHENSIVE BOOK DESCRIBES THE FUNDAMENTAL PROPERTIES OF SOFT X-RAYS AND EXTREME ULTRAVIOLET (EUV) RADIATION AND DISCUSSES THEIR APPLICATIONS IN A WIDE VARIETY OF FIELDS, INCLUDING EUV LITHOGRAPHY FOR SEMICONDUCTOR CHIP MANUFACTURE AND SOFT X-RAY…
Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Paperback)
리뷰
5.0 임-안 마음에 들어요^^ 2009.09.11